METHOD FOR FLATTENING a SOLID SURFACE

摘要

A method for flattening a sample surface by irradiating the sample surface with a gas cluster ion beam, generates clusters of source gas in a cluster generating chamber (11), ionizes the generated clusters in an ionization chamber (13), accelerates the ionized cluster beam in an electric field of an accelerating electrode (15), selects a cluster size using a magnetic field of a sorting mechanism (17), and irradiates the surface of a sample (20). An irradiation angle between the sample surface and the gas cluster ion beam is less than 30° and an average cluster size of the gas cluster ion beam is 50 or above.