| 发明名称 |
Position control device of moving body, stage device using the position control device, and position control method of moving body |
| 摘要 |
A position control device of a moving body, by which position control device a moving body can be driven in a translational manner with high precision where the moving body is not rotated in a yawing direction even if disturbance is input, a stage device using the position control device, and a position control method of a moving body, is provided.
|
| 申请公布号 |
US7333862(B2) |
申请公布日期 |
2008.02.19 |
| 申请号 |
US20060599512 |
申请日期 |
2006.11.15 |
| 申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
MAKINO KENNICHI |
| 分类号 |
G05B19/18;B60G23/00;B62C3/00;B62K25/00;G05D3/00;G06F7/00;G06F17/00;G06F19/00 |
主分类号 |
G05B19/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
