| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of easily and drastically changing the dimension of a beam cross section. <P>SOLUTION: A lens array system moving mechanism switches a first state in which a first lens array system is arranged at a prescribed position for a laser beam to enter, and a second state in which a second lens array system is arranged at a prescribed position for a laser beam to enter. The first and the second lens array system each contain a cylindrical lens array, splitting an incident laser beam into light beam bundles corresponding to each cylindrical lens. In the first state, the light beam bundle split by the first lens array system is superimposed by a condensing lens on the same area on a surface to be machined, with the beam cross section of the first dimension formed. In the second state, the light beam bundle split by the second lens array system is superimposed by the condensing lens on the same area on the surface to be machined, with the beam cross section of the second dimension formed that is different from the first dimension. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
