Resonant ellipsometer and method for determining ellipsometric parameters of a surface

摘要

A resonant ellipsometer and method for determining ellipsometric parameters of a surface provide an efficient and low-cost mechanism for performing ellipsometric measurements. A surface of interest is included as a reflection point of a resonance optical path within a resonator. The intersection of the resonance optical path with the surface of interest is at an angle away from normal so that the complex reflectivity of the surface alters the phase of the resonance optical path. Intensity measurements of light emitted from a partially reflective surface of the resonator for orthogonal polarizations and for at least two effective cavity lengths provide complete information for computing the ellipsoidal parameters on the surface of interest. The resonator may be a Fabry-Perot resonator or a ring resonator. The wavelength of the illumination can be swept, or the cavity length mechanically or electronically altered to change the cavity length.