METHOD FOR PRODUCING SILICON FINE PARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method for efficiently producing silicon fine particles. SOLUTION: The method for producing silicon fine particles comprises forming silicon fine particles by pulverizing at least one portion of single crystal silicon by colliding oxide particles with the single crystal silicon by applying an ultrasonic wave to a dispersion containing the oxide particles and a dispersion medium while bringing the dispersion into contact with the single crystal silicon. COPYRIGHT: (C)2008,JPO&INPIT