| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate tray which prevents an evaporating material from sneaking into a part which has to be covered by a mask, and precisely forms a film with a predetermined pattern on a glass substrate, and to provide a film-forming apparatus therefor. SOLUTION: The substrate tray holds a substrate, is arranged so as to face a material source for the thin film, and comprises: a holding member that holds the substrate and has an aperture through which the particle of the material for the thin film to be deposited on the substrate after having departed from the material source for the thin film passes; the first mask which is arranged between the substrate and the hold member, and controls the thin film formed on the substrate into a predetermined shape, by shielding the particle of the material for the thin film, which has passed through the aperture, so as not to deposit on the substrate; and the second mask which is arranged between the first mask and the holding member, and covers at least one part of the first mask so as to prevent the particle of the material for the thin film from depositing on the first mask. COPYRIGHT: (C)2008,JPO&INPIT |
