SELECTIVE WET ETCHING OF OXIDES,申请号EP20060751175-传众专利搜索

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发明名称	SELECTIVE WET ETCHING OF OXIDES
摘要
申请公布号	EP1880410(A2)	申请公布日期	2008.01.23
申请号	EP20060751175	申请日期	2006.04.25
申请人	SACHEM, INC.	发明人	WOJTCZAK, WILLIAM;COLLINS SIAN
分类号	H01L21/311	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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