ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

Provided is an illuminating optical apparatus which can separately illuminate two regions at a distance under prescribed illuminating conditions. The illuminating optical apparatus is provided with a first illuminating system for illuminating a first illuminating region (M1), and a second illuminating system for illuminating a second illuminating region (M2). The first illuminating system has first variable systems (11, 13, 14) for varying the shape or the size of light intensity distribution on an illumination pupil of the first illuminating system, and the second illuminating system has second variable systems (21, 23, 24) for varying the shape or the size of light intensity distribution on an illumination pupil of the second illuminating system. The first variable system and the second variable system independently vary the light intensity distribution on the illumination pupil of the first illuminating system and the light intensity distribution on the illumination pupil of the second illuminating system.