<p>A variable lot size load port assembly includes a tool interface, a port door, an advance plate, and first and second latch keys. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The first latch key is disposed on the port door at a first elevation configured to selectively engage a corresponding latch key receptacle of a FOUP having a first selected FOUP capacity and the second latch key is disposed on the port door at a second elevation configured to selectively engage a corresponding latch key receptacle of another FOUP having a second selected FOUP capacity.</p>
申请公布号
WO2008008738(A2)
申请公布日期
2008.01.17
申请号
WO2007US73086
申请日期
2007.07.09
申请人
ASYST TECHNOLOGIES, INC.;BONORA, ANTHONY, C.;KROLAK, MICHAEL;HINE, ROGER, G.;ROGERS, THEODORE, W.
发明人
BONORA, ANTHONY, C.;KROLAK, MICHAEL;HINE, ROGER, G.;ROGERS, THEODORE, W.