发明名称 PHOTOSENSITIVE RESIN COMPOSITION, LAYERED PRODUCT THEREOF, CURED OBJECT THEREFROM, AND METHOD OF FORMING PATTERN FROM THE COMPOSITION (2)
摘要 <p>A photosensitive resin composition which can form a pattern having high resolution and a high aspect ratio and has high sensitivity. The photosensitive resin composition comprises one or more epoxy resins (A) selected among epoxy resins (A-1) having a biphenyl structure and polyfunctional epoxy resins (A-2), a polyfunctional bisphenol-A novolak epoxy resin (B), and a cationic photopolymerization initiator (C) which is sulfonium tris(pentafluoroethyl) trifluorophosphate.</p>
申请公布号 WO2008007762(A1) 申请公布日期 2008.01.17
申请号 WO2007JP63954 申请日期 2007.07.13
申请人 NIPPON KAYAKU KABUSHIKI KAISHA;MICROCHEM CORP.;SAKAI, RYO;MORI, SATOSHI;HONDA, NAO;JOHNSON, DONALD;MILLER, HARRIS 发明人 SAKAI, RYO;MORI, SATOSHI;HONDA, NAO;JOHNSON, DONALD;MILLER, HARRIS
分类号 C08G59/20;G03F7/029;G03F7/004;G03F7/032;G03F7/38;G03F7/40;H01L21/027 主分类号 C08G59/20
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