发明名称 METHOD FOR BUILDING MAP DATA FOR PROBING TESTER, AND METHOD FOR TESTING SEMICONDUCTOR CHIP USING THE SAME
摘要 A method for preparing map data for a probing test is provided to shorten an interval of test time by enabling testing of every semiconductor chip on a wafer by only one test process wherein the semiconductor chips are different in size and are installed at irregular intervals. A plurality of semiconductor chips formed on a wafer are grounded into N groups to have uniform sizes and intervals wherein each group has N virtual chips(S100). Basic map data is prepared with respect to the N virtual chips(S300). Each chip matrix is prepared with respect to the plurality of semiconductor chips included in each virtual chip(S400). Chip address information is given to every semiconductor chip in the virtual chip, and chip interval information is given to every semiconductor chip in the virtual chip(S500). The N chip matrixes with respect to the N virtual chips are added to the basic map data to complete map data(S600).
申请公布号 KR100793271(B1) 申请公布日期 2008.01.10
申请号 KR20060132987 申请日期 2006.12.22
申请人 SECRON CO., LTD. 发明人 KIM, DONG IL;KANG, KYEONG YONG
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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