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发明名称
Katadioptrisches Objektiv mit hoher numerischer Apertur
摘要
申请公布号
DE60131603(D1)
申请公布日期
2008.01.10
申请号
DE20016031603
申请日期
2001.07.16
申请人
ASML HOLDING, N.V.
发明人
WILLIAMSON, DAVID M.
分类号
G02B5/30;G02B17/08;G02B13/18;G02B27/18;G03F7/20;H01L21/027
主分类号
G02B5/30
代理机构
代理人
主权项
地址
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