发明名称 Semiconductor device and method of manufacturing the same
摘要 To obtain a semiconductor device and a method of manufacturing the same which can reduce influence of fluctuation in characteristic among transistors due to fluctuation in laser light irradiation number and laser light intensity on a semiconductor. There is provided a semiconductor device with plural pixels having transistors forming a matrix pattern, in which: the transistors have semiconductors crystallized by laser light irradiation; the semiconductors stretch over at least two pixels; the length of each of the semiconductors is longer than the pixel pitch of the pixels; and when the scan pitch of the laser light is given as M and the pixel pitch of the pixels is given as N, the semiconductors are irradiated with the laser light N/M times or more.
申请公布号 US7316948(B2) 申请公布日期 2008.01.08
申请号 US20050155671 申请日期 2005.06.20
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KIMURA HAJIME;ANZAI AYA;YAMAZAKI SHUNPEI
分类号 H01L21/84;H01L21/77;H01L27/12;H01L27/15;H01L27/32 主分类号 H01L21/84
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