| 摘要 |
A method of fabricating an upper substrate of an LCD is provided to simplify the process and improve the yield rate by forming both a transparent common electrode and a liquid crystal alignment layer in one vacuum deposition equipment. A transparent common electrode(114) is deposited on a CF(color filter glass) substrate(113) in a vacuum deposition equipment. Ag is doped on the transparent common electrode using an Ag target to form an Ag layer(115) in the vacuum deposition equipment. An inorganic thin film is slantly deposited on the Ag layer using an inorganic material target to form an alignment layer(116) in the vacuum deposition equipment. The transparent common electrode, the Ag layer, and the alignment layer are successively formed on one vacuum deposition equipment. The inorganic material is one selected from SiO, Ta2O5, ZrO, and Al2O3. |
