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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR100791660(B1)
申请公布日期
2008.01.03
申请号
KR20077013776
申请日期
2007.06.18
申请人
发明人
分类号
H01L21/31;H05H1/46;B01J19/08;H01J37/32;H01L21/00
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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