A METHOD OF CHARACTERISING THE TRANSMISSION LOSSES OF AN OPTICAL SYSTEM

摘要

A method for characterizing transmission loss of an optical system is provided to minimize the action of different transmission losses between P polarization and S polarization in an optical system by comparing an illumination profile with a detected radioactive rays and by determining the transmission losses with respect to S polarization and P polarization capable of being used in scatterometry modeling. The illumination profile of a radioactive ray beam(B) is measured. The radiation beam is projected through an optical system. The intensity distribution of the radiation beam projected through the optical system is measured. The measured spectrum and the illumination profile are compared to characterize transmission losses wherein the transmission losses with respect to P polarization and S polarization can be characterized.