APPARATUS FOR CHECKING LEAK OF CATHODE PART IN CVD EQUIPMENT AND METHOD FOR CHECKING LEAK THEREOF

摘要

An apparatus for checking a leak of a cathode part in CVD equipment is provided to solve a problem generated by a breakdown of CVD equipment by reducing or minimizing a helium leak phenomenon of CVD equipment caused by a setting error of a cathode part. A cathode part(102) is installed in an inner space formed in a leak check part(100) for checking a leak. A gas detector injects gas to the cathode part to detect whether gas leaks from the cathode part. The gas check part can include a body part and a support part coupled to the lower part of the body part. A space for installing the cathode part is formed in the body part. The body part is supported by the support part.