发明名称 SYSTEMS AND METHODS FOR RECLAIMING PROCESS FLUIDS IN A PROCESSING ENVIRONMENT
摘要 <p>Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.</p>
申请公布号 WO2007135502(A1) 申请公布日期 2007.11.29
申请号 WO2007IB01245 申请日期 2007.05.14
申请人 L'AIR LIQUIDE-SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;URQUHART, KARL, J.;GUARNERI, GEORGE;MARC, JEAN-LOUIS;FANJAT, NORBERT;LANGELLIER, LAURENT;COLIN, CHRISTOPHE 发明人 URQUHART, KARL, J.;GUARNERI, GEORGE;MARC, JEAN-LOUIS;FANJAT, NORBERT;LANGELLIER, LAURENT;COLIN, CHRISTOPHE
分类号 B01F15/04;H01L21/00 主分类号 B01F15/04
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