| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain a high definition drawing while maintaining a spot at a certain intensity without using a microlens in exposure by a direct drawing system. <P>SOLUTION: The light rays from a light source is emitted to a DMD (11) that reflects light by the ON/OFF operation of each micromirror; the light rays reflected on the DMD is image-formed through a first optical system (12) and split into three beams by a tripartite mirror 20 disposed on the imaging plane by the first optical system, in a direction approximately perpendicular to the imaging direction by the light from the DMD; and the divided beam is reduced by a second optical system (16) as well as imaged onto a drawing plane (17). <P>COPYRIGHT: (C)2008,JPO&INPIT |
