发明名称 |
POSITIVE PHOTORESIST COMPOSITION, THICK FILM PHOTORESIST LAMINATE, METHOD FOR PRODUCING THICK FILM RESIST PATTERN, AND METHOD FOR PRODUCING CONNECTING TERMINAL |
摘要 |
<p>This positive photoresist composition is a positive photoresist composition for exposing to light having one or more wavelengths selected from g-rays, h-rays and i-rays, comprising: (A) a compound which generates an acid under irradiation with active rays or radiation, and (B) a resin whose solubility in an alkali is enhanced by an action of an acid, wherein the component (A) contains an onium salt (A1) having a naphthalene ring in the cation moiety.</p> |
申请公布号 |
KR20070110123(A) |
申请公布日期 |
2007.11.15 |
申请号 |
KR20077022666 |
申请日期 |
2007.10.04 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
MISUMI KOICHI;WASHIO YASUSHI;SENZAKI TAKAHIRO;SAITO KOJI |
分类号 |
G03F7/039 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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