发明名称 POSITIVE PHOTORESIST COMPOSITION, THICK FILM PHOTORESIST LAMINATE, METHOD FOR PRODUCING THICK FILM RESIST PATTERN, AND METHOD FOR PRODUCING CONNECTING TERMINAL
摘要 <p>This positive photoresist composition is a positive photoresist composition for exposing to light having one or more wavelengths selected from g-rays, h-rays and i-rays, comprising: (A) a compound which generates an acid under irradiation with active rays or radiation, and (B) a resin whose solubility in an alkali is enhanced by an action of an acid, wherein the component (A) contains an onium salt (A1) having a naphthalene ring in the cation moiety.</p>
申请公布号 KR20070110123(A) 申请公布日期 2007.11.15
申请号 KR20077022666 申请日期 2007.10.04
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 MISUMI KOICHI;WASHIO YASUSHI;SENZAKI TAKAHIRO;SAITO KOJI
分类号 G03F7/039 主分类号 G03F7/039
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