SCRIBING APPARATUS AND SCRIBING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a scribing apparatus and scribing method in which the accuracy of position for forming a modified part is improved.

SOLUTION: Scribing is made by forming the modified part by condensing a laser light that is emitted from a laser light source 2 into the inside of a work 9 through a condensing lens 8. The condensing lens 8 is constructed by 4 lenses having different focal length and they can be arranged on a lens supporting part 10 by changing their positions by rotating them around the center 10a of the lens supporting part 10. When irradiating the laser light by changing the condensing lens 8, the modified part can be formed at a different position in the direction of an optical axis 7. The modified parts are formed in a row by repeating the changing of the condensing lenses 8 and the irradiation of the laser light. The modified parts are formed by relatively moving the work 9 and the condensing lens 8 in a X direction and arranging them.

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