Apparatus for fabricating a photo mask,申请号KR20010037936-传众专利搜索

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发明名称	Apparatus for fabricating a photo mask
摘要
申请公布号	KR100771532(B1)	申请公布日期	2007.10.31
申请号	KR20010037936	申请日期	2001.06.29
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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