发明名称 Sample body polishing finishing method, involves monitoring polishing of body by temporally disintegrated measuring of actual force exerted on body, and completing polishing when actual strength strongly varies from given default value
摘要 <p>The method involves polishing a sample body (2) with a polishing medium (6) e.g. polishing wheel, in a polishing plane (7), where the sample body has a number of planar layers, which run parallel to each other. The polishing procedure is monitored by temporally disintegrated measuring of actual force (8, 10), which is exerted on the sample body during polishing. The polishing of the sample body is completed, when the actual strength strongly varies from a given default value. An independent claim is also included for a device for polishing finishing of a sample body having a number of planar layers.</p>
申请公布号 DE102006018276(A1) 申请公布日期 2007.10.31
申请号 DE20061018276 申请日期 2006.04.20
申请人 CONTI TEMIC MICROELECTRONIC GMBH 发明人 HEINZ, HELMUT;HOFMANN, MARKUS
分类号 B24B1/00;B24B27/00;B24B49/16;H01L21/304 主分类号 B24B1/00
代理机构 代理人
主权项
地址