| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump capable of preventing deposition of reaction product while inhibiting rise of rotor temperature. SOLUTION: In the turbo-molecular pump 1 discharging gas by driving and rotating the rotor 4 in relation to a stationary blade 21, a base 6, a discharge port 6a and the rotor 4 contacting exhaust gas in a pressure zone where reaction product is not formed are arranged in parts between a driven and rotated spindle 5 and the turbo-molecular pump, and heat exchangers 28, 29 heating the base 6 and the discharge port 6a and cooling the spindle 5 are provided. Consequently, deposition of reaction product at the base 6 and the discharge port 6a can be prevented. Moreover, temperature rise of the spindle 5 can be inhibited and temperature rise of the rotor 4 can be inhibited. COPYRIGHT: (C)2008,JPO&INPIT
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