| 摘要 |
An electrostatic actuation method for micro-electromechanical systems, comprising: providing a first electrode ( 10 ) integral to a movable part ( 100 ) of the micro-electromechanical system, and providing at least a second electrode ( 20, 20 ') also integral to the same movable part ( 100 ) of the micro-electromechanical system, there being a gap ( 40 ) between said first and second electrodes, where said first and second electrodes are electrically isolated from each other using an electrically non-conductive material ( 30 ), inducing a charge in the electrodes which generates a force between the electrodes, said force acting between the electrodes causing the deformation of the movable part of the micro-electromechanical system. The invention also relates to an electrostatic actuator with integral electrodes for micro-electromechanical systems.
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