| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for a flat panel display element test, allowing various probe arrangements in response to a tendency of forming micro-finely a pad electrode of a flat panel display element, and capable of preventing a malfunction caused by short circuiting between the adjacent probes, and a method of manufacturing the inspection device without requiring manual work. SOLUTION: The inspection device includes a substrate 100, a body 118 arranged on the substrate, the plurality of probes 115 projected extendedly from both sides of the body, and a probe chips 122 arranged in lower ends of the probes projected extendedly from one side face of the body. The each probe is coated with an insulating film. COPYRIGHT: (C)2008,JPO&INPIT
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