| 摘要 |
An apparatus for trapping semiconductor by-products is provided to execute inherent functions of first and second chambers by preventing the first and second chambers from contacting each other directly. A first chamber(216) is communicated with a first coupling port(212) of a housing(210) and a second chamber(218) is communicated with a second coupling port(214) of the housing. A heating member is installed in the housing in a longitudinal direction of the first chamber to generate heat, and a cooling water member is installed in the housing in a longitudinal direction of the second chamber to circulate cooling water. The buffer defining member has a first horizontal plate and a second horizontal plate, with a buffer chamber being interposed between the first and second horizontal plates.
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