| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus achieving high-speed pattern transfer by a nano imprinting method. SOLUTION: A stamper having a pattern formed on the surface is butted against a base material having a soft surface, and pressure is applied at a specified temperature so that the pattern is transferred on the surface of the base material. The pattern transfer method includes a process for arranging two or more pairs of the base materials and the stampers by stacking in a pressurizing direction and sandwiching them by a pair of plate-like members having a temperature regulating means for applying pressure. COPYRIGHT: (C)2008,JPO&INPIT |
