| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate washing device capable of easily manufacturing a liquid crystal color filter capable of image display of high quality. <P>SOLUTION: The substrate washing device includes a washing liquid supply means, an ultrasonic wave applying means, and a substrate driving part. The washing liquid supply means includes a front lip 22, a rear lip 21, a manifold part 23 formed on one of the front lip and the rear lip, and a slit part 25 for discharging a washing liquid, as shown in Figure 2. The slit part is formed in a direction perpendicular to a driving direction of the substrate driving part by making the front lip and the rear lip face each other in parallel, and the slip part is connected to the manifold part, and an inlet of the washing liquid is connected to the manifold part, and substantially the same width as the front lip or the rear lip is given to the manifold part. <P>COPYRIGHT: (C)2008,JPO&INPIT |
