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发明名称
SOI-Isolationsgrabenstrukturen
摘要
申请公布号
DE102005059034(B4)
申请公布日期
2007.10.11
申请号
DE200510059034
申请日期
2005.12.10
申请人
X-FAB SEMICONDUCTOR FOUNDRIES AG
发明人
LERNER, RALF;ECKOLDT, UWE
分类号
H01L21/762;H01L27/12
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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