| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact and high-sensitivity electret condenser microphone (ECM) having superior productivity. <P>SOLUTION: In an air gap structure, upper and lower electrodes 23, 13 oppose each other at a hollow section 16. An electret film 20 of a charge holding material is formed between the electrodes. An ECM 10 and a semiconductor substrate 11 are integrated. The electret film 20 is made of a perfluoro amorphous fluorine polymer resin. The electret film 20 made of such a material can be formed on the substrate 11 by spincoating, thus thinning the film easily. Further, the electret film 20 can be etched easily by fluorine gas used in a semiconductor process, thus enabling micromachining and reducing a condenser area. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
