发明名称 Polierzusammensetzung und Poliermethode
摘要 A polishing composition includes an abrasive, phosphoric acid, and an oxidizing agent and has a pH of 6 or less. The polishing composition has the capability for polishing an alloy containing nickel and iron with a high stock removal rate. Accordingly, the polishing composition is preferably used in an application for polishing an object including the alloy containing nickel and iron.
申请公布号 DE602005002164(D1) 申请公布日期 2007.10.11
申请号 DE20056002164T 申请日期 2005.03.18
申请人 FUJIMI INC. 发明人 TAMAI, KAZUSEI;YAMATO, YASUYUKI
分类号 B24B37/00;C09G1/02;C09K3/14;C23F1/28;H01L21/304;H01L21/306 主分类号 B24B37/00
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