发明名称 |
Polierzusammensetzung und Poliermethode |
摘要 |
A polishing composition includes an abrasive, phosphoric acid, and an oxidizing agent and has a pH of 6 or less. The polishing composition has the capability for polishing an alloy containing nickel and iron with a high stock removal rate. Accordingly, the polishing composition is preferably used in an application for polishing an object including the alloy containing nickel and iron. |
申请公布号 |
DE602005002164(D1) |
申请公布日期 |
2007.10.11 |
申请号 |
DE20056002164T |
申请日期 |
2005.03.18 |
申请人 |
FUJIMI INC. |
发明人 |
TAMAI, KAZUSEI;YAMATO, YASUYUKI |
分类号 |
B24B37/00;C09G1/02;C09K3/14;C23F1/28;H01L21/304;H01L21/306 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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