发明名称 Improvements in or relating to semiconductor devices
摘要 1,046,721. Semi-conductor devices. STANDARD TELEPHONES & CABLES Ltd. Feb. 13, 1964 [Feb. 15, 1963], No.6258/63. Heading H1K. A P-N junction semiconductor device includes a body 1 of semiconductor material of one conductivity type having a layer 2 of semiconductor material of opposite conductivity type immersed in the body so that part of the body material surrounds and inwardly overlaps the layer material to expose a surface of the layer, the thickness of the overlapping portions of the body material being less than the spread of a space charge region set up by application to the junction of a reverse bias voltage such as to cause avalanche breakdown within the body material. The body material has a high resistivity compared with the layer material. The device may be made by depositing epitaxially a P-type silicon layer on a slice of N-type silicon, removing part of the layer by etching or air abrasion to leave an area corresponding in size to the required layer 2, and depositing a layer of N-type silicon on the slice to cover the P-type layer. Phosphorus pentoxide is then deposited on the lower face of the slice and heat is applied to diffuse the phosphorus pentoxide into the silicon to form a low-resistivity contact area 4 and to diffuse the P-type material into the surrounding N-type material to form the junction 3. The overlying N-type material is then excavated by etching or air abrasion to expose the layer 2.
申请公布号 GB1046721(A) 申请公布日期 1966.10.26
申请号 GB19630006258 申请日期 1963.02.15
申请人 STANDARD TELEPHONES AND CABLES LIMITED 发明人 STERLING HENLEY FRANK;DRAKE CYRIL FRANCIS
分类号 C23C16/34;C23C16/50;H01L21/00;H01L21/316;H01L21/318;H01L23/29;H01L29/00;H01L29/06 主分类号 C23C16/34
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