| 摘要 |
A film forming apparatus is provided to extend a lifetime of a plasma gun by preventing electrons from colliding with one another inside cathode, grid, and anode electrodes. A film forming apparatus includes a vacuum chamber, a hearth, and a plasma gun. The hearth is arranged inside the vacuum chamber and receives a film source. The plasma gun is arranged inside the vacuum chamber and irradiates electrons into the vacuum chamber. The plasma gun includes a cathode electrode(31), a grid electrode, and an anode electrode(34). The cathode electrode includes a first electrode hole for generating an electron flow. The grid electrode includes a second hole, which is coupled with the first hole for accelerating the electrons. The anode electrode includes a third hole, which is coupled with the second hole for irradiating the electrons on the film source. At least one of the electrodes includes a surface which is slanted with respect to an electron flow direction.
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