ANTIFOULING FILM, SUBSTRATE STRUCTURE AND METHOD FOR MANUFACTURING THE SUBSTRATE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a titanium oxide thin film the surface of which is prevented from being fouled and to provide a substrate structure equipped with the titanium oxide thin film and a method for manufacturing the substrate structure. SOLUTION: The antifouling film consists of the fired titanium oxide thin film which has an anatase type crystal structure, exhibits hydrophilicity when irradiated with UV light and is deposited on the surface. The fired titanium oxide thin film having 1-5 nm thickness is obtained by depositing titanium oxide on the surface of a substrate in an oxidizing atmosphere by EB vapor deposition while using TiO2as a vapor deposition source and firing the titanium oxide-deposited substrate in the atmosphere or in an oxygen atmosphere. The substrate structure is a metallic mold structure which is used for a nanoimprint and has a predetermined pattern or a photomask structure which is exposed to form the predetermined pattern on the surface of the substrate and has a photomask. COPYRIGHT: (C)2007,JPO&INPIT