APPARATUS AND METHOD FOR CARRYING SUBSTRATES,申请号WO2007US63794-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR CARRYING SUBSTRATES
摘要	The present invention provides a method and an apparatus for carrying at least one substrate for plasma processing. The method and apparatus comprising a carrier for transporting the substrate, that is located unbonded on the carrier, onto a substrate support within a plasma system for plasma processing. An electrostatic clamp, that is coupled to the substrate support, electrostatically secures the substrate to the substrate support through the carrier during plasma processing.
申请公布号	WO2007109448(A2)	申请公布日期	2007.09.27
申请号	WO2007US63794	申请日期	2007.03.12
申请人	OERLIKON USA, INC.;JOHNSON, DAVID;LAI, SHOULIANG	发明人	JOHNSON, DAVID;LAI, SHOULIANG
分类号	H01L21/683	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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