发明名称 ATOMIC FORCE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To realize an atomic force microscope, which enables space saving and short-time measurement, using a displacement detector having reproducibility of several ten picometer. SOLUTION: The atomic force microscope is equipped with a cantilever 5 of which the back is mirror surface and first and second laser beam sources 1 and 2 both of which are different in wavelength. Laser beams 3 and 4 are respectively emitted to the mirror surface of the cantilever 5 from the laser beam sources 1 and 2. Two laser beam sources 1 and 2 are equipped with condensing optical systems independent to each other and the laser beam 3 enters the mirror surface of the free end part of the cantilever 5 to form a focus and enters a first photodetector 8. The laser beam 4 enters the mirror surface of the fixed end part of the cantilever 5 to form a focus and reflected by a dichroic mirror 7 for reflecting only the wavelength vicinity of the laser beam 4 to be thrown on a second photodetector 9. The displacement of the cantilever of high precision is obtained from the difference between the position data of two laser beams 3 and 4 due to two photodetectors 8 and 9. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007248168(A) 申请公布日期 2007.09.27
申请号 JP20060070132 申请日期 2006.03.15
申请人 CANON INC 发明人 OKUMA ISAMU
分类号 G01B11/00;G01C3/06;G01Q20/02;G01Q60/24 主分类号 G01B11/00
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