| 发明名称 |
Displacement measurement system |
| 摘要 |
A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring excessive space.
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| 申请公布号 |
EP1837630(A1) |
申请公布日期 |
2007.09.26 |
| 申请号 |
EP20070250993 |
申请日期 |
2007.03.09 |
| 申请人 |
ASML NETHERLANDS BV |
发明人 |
KLAVER, RENATUS GERARDUS;LOOPSTRA, ERIK ROELOF;VAN DER PASCH, ENGELBERTUS ANTONIUS FRANCISCUS |
| 分类号 |
G01D5/38 |
主分类号 |
G01D5/38 |
| 代理机构 |
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