Anisotropic conductive sheet, production process, contact structure, electronic device and inspection apparatus for operation test

摘要

An anisotropic conductive sheet comprising an insulating base material and a plurality of conductive passages embedded at predetermined positions in the insulating base material, penetrating the insulating base material in the thickness direction. The conductive passage comprises a matrix consisting of non-silicone material or silicone material having rubber elasticity, the matrix material being filled into through-holes formed at a predetermined position in the base material and then hardened, and a conductive filler dispersed in the matrix at an amount capable of exhibiting conductivity at all times. A surface layer of conductive material is capable of functioning as a contact and ensuring an electrical connection by piercing a surface layer of an opponent when the surface layer is used as a contact, such as a layer of fine conductive particles is further provided on at least one of the end faces of the conductive passage. An anisotropic conductive sheet of the present invention can be advantageously used in an electronic device or inspection apparatus, used for an operation test, as a contactor.