METHOD FOR VAPORIZING VAPOR-DEPOSITION MATERIAL, VAPORIZING APPARATUS THEREFOR, AND VACUUM VAPOR-DEPOSITING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vaporizing apparatus which can easily control the start and stop of a vaporizing operation, and an evaporating amount. SOLUTION: This vaporizing apparatus comprises: a vaporizing vessel 21; a first heating device 22 which heats and melts a material accommodated in a material-accommodating section 20A, in the vaporizing vessel 21; a cylindrical transportation drum 23 which immerses its lower part into a molten material (A) and transports the molten material (A) to an upper part along with an outer circumferential member 23a; a second heating device 24 for heating and vaporizing the molten material (A) which has been transported to a vaporizing section 20B along with the transport drum 23; and a vaporization control unit for controlling a heating temperature of the second heating device 24. COPYRIGHT: (C)2007,JPO&INPIT