| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic device having a protective film having excellent moistureproof performance. SOLUTION: The method has a film formation step of a protective film for forming the film by charging a material constituent of the protective film, by a discharge means, on an organic element composed of at least a pair of electrodes and an organic compound arranged between the electrodes. In the film formation step of the protective film, the protective film is formed while the potential of an organic element substrate 101 is fixed at a potential lower than a plasma potential. COPYRIGHT: (C)2007,JPO&INPIT
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