| 摘要 |
Inspection equipment for a glass substrate being employed in a flat panel display, the glass substrate subjected to cutting at the corner and boring of a through hole, characterized by comprising a stopper provided in the middle of a glass substrate carrier, for stopping the glass substrate at a predetermined position, an image capturing unit consisting of an illuminator on a line being arranged perpendicularly to the carrying direction of the glass substrate and directed from one side of the stopped glass substrate, and a camera provided oppositely to the illuminator across the glass substrate, directed in the direction perpendicular to the carrying direction of the glass substrate and movable in parallel therewith with its optical axis kept perpendicular to the glass substrate, and an image processor for processing the images of the cut at the corner of the glass substrate and the through hole.
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