发明名称 Systems and methods for cross-intrabay transport
摘要 A transport system. The transport system comprises a first interbay component, a second interbay component, a plurality of intrabay components, and a route controller. The first and second interbay components transport the vehicles between the tool bays. Each of the intrabay components, linked with the second interbay component, transports the vehicles within one of the tool bays. Additionally, the intrabay component does not link with the first interbay component directly. The route controller estimates a transport cost for transporting the vehicle via the second interbay device, and determines whether the vehicle is to be transported via the first or second interbay component according to the estimated transport cost.
申请公布号 US2007198333(A1) 申请公布日期 2007.08.23
申请号 US20060358470 申请日期 2006.02.21
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 WANG KUO-HUA;WANG HSING- FU
分类号 G06Q10/00 主分类号 G06Q10/00
代理机构 代理人
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