| 摘要 |
A lift pin calibrator and a method of using the same set the height and orientation of a lift pin relative to a substrate support plate having a bore in which the lift pin is raised and lowered. The lift pin calibrator has a contact body, a pressure member and a tubular alignment member that are disposed coaxially. A pressure transmitting portion of the pressure member extends into an upper portion of the alignment member and the contact component extends through the pressure member so that an end of the contact component is left exposed by the pressure member. An outer diameter of the pressure transmitting portion of the pressure member is greater than an inner diameter of the alignment member. An extension of the alignment member is inserted into a bore of the substrate support plate. The pressure transmitting portion of the pressure member is forced into the alignment member to expand the alignment member and hold it in place. The lower end of a contact component is set at a predetermined height above the upper surface of the substrate support plate. The lift pin is raised via an elevating structure and into the extension of the alignment member until the top of the lift pin contacts the contact component. Subsequently, the lift pin is fixed in place relative to the elevating structure.
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