METHOD AND APPARATUS FOR MANUFACTURING GRANULAR SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method for manufacturing granular semiconductors having a desired and uniform particle diameter with high productivity and good reproducibility.

SOLUTION: The apparatus for manufacturing the granular silicon by discharging the melt of silicon from the nozzle part 1a of a crucible 1 to make the melt fall in the form of granules and at the same time, solidifying the granular melt by cooling it during falling comprises: a vibrating means for vibrating the crucible 1; a pressurizing means for discharging the melt by pressurizing the inside of the crucible 1; an observation means 4 for observing the discharged melt; and a control means for controlling the vibrating means while comparing the observed particle diameters of droplets of the melt with the prescribed particle diameter so that the frequency of vibration by the vibrating means is increased when the particle diameters of the droplets are larger than the prescribed diameter and the frequency of vibration by the vibrating means is decreased when the particle diameters of the droplets are smaller than the prescribed diameter.

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