INTERNAL STRESS ACTUATED MICRO- AND NANOMACHINES FOR TESTINGPHYSICAL PROPERTIES OF MICRO AND NANO-SIZED MATERIAL SAMPLES

摘要

This invention provides an internal stress actuated micro- or nano-machine for measuring mechanical and/or electrical properties, e.g. traction measurement, compression measurement or shear measurement, on micro-scale and nano-scale films or multi-layers of materials such as metallic materials, carbon-based materials and silicon-base materials. The device of the invention has applications in materials production industry, as well as in micro-electronics and for surface treatments and functionalization.