| 摘要 |
PROBLEM TO BE SOLVED: To suppress reverse flowing of particles from a turbo-molecular pump to a vacuum treatment chamber. SOLUTION: The turbo-molecular pump 1 is provided with a composition for reducing a speed when capturing particles 20 flying from the vacuum treatment chamber, or when the particles bounce back in the turbo-molecular pump, and by this, bouncing of the particles from an inlet 12 to an upstream side is reduced, and reverse flowing of the particles from the turbo-molecular pump to the vacuum treatment chamber is suppressed. A composition provided with a trap space 40 or a recessed part 30 for capturing the particles, or a composition of a capturing member 50 burying and capturing the particles is provided as a composition of capturing the flying particles in the turbo-molecular pump, or a composition of a cushioning member reducing the bouncing speed of the entering and recoiled particles is provided as a composition of reducing the speed when the particles bounce back. COPYRIGHT: (C)2007,JPO&INPIT
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