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发明名称
PHOTORESIST POLYMER COMPOSITIONS
摘要
申请公布号
EP1641848(B1)
申请公布日期
2007.08.22
申请号
EP20040756066
申请日期
2004.06.25
申请人
JSR CORPORATION
发明人
BENOIT, DIDIER;SAFIR, ADAM;CHANG, HAN-TING;CHARMOT, DOMINIQUE;NISHIMURA, ISAO;SOYANO, AKIMASA;OKAMOTO, KENJI;WANG, YONG
分类号
C08F220/18;C08F20/18;C08F220/30;G03F7/039
主分类号
C08F220/18
代理机构
代理人
主权项
地址
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