| 摘要 |
PROBLEM TO BE SOLVED: To keep accuracy of testpiece positioning in a positioning device by using an elevation pin having reduced sliding resistance even if the testpiece becomes large in size. SOLUTION: In a testpiece positioning method and a device, the tip of an elevation pin 2 is made like a ball so as to reduce siding resistance. Thus, the positioning device is applicable to a large-sized testpiece, and the accuracy of testpiece positioning can be improved. Furthermore, a position control unit is obliquely arranged and a clamp pin 4 is elevated, thereby avoiding interference caused by contact with an objective lens. COPYRIGHT: (C)2007,JPO&INPIT |
