发明名称 |
DISPOSITION METHOD OF SCRIBE ITEM |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a scribe item disposition method by which a disposition process can be automated even for a complicated scribe item disposition specification that has no agreement between the disposition order of items and disposition importance degrees. <P>SOLUTION: The scribe item disposition method includes the steps of: making a list of items to be disposed in a scribe area 1; disposing the items listed in the list of items to be disposed according to the designated rules of disposition order and disposition places; checking whether all indispensable items are disposed or not; and if any of the indispensable items are not disposed, deleting optional items one by one according to the designated deletion order from the list of items to be disposed; and returning to the step of disposing items according to the above-mentioned rules. The deletion order of optional items is designated in a reverse order of disposition importance independent from the disposition order of the items. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
申请公布号 |
JP2007206402(A) |
申请公布日期 |
2007.08.16 |
申请号 |
JP20060025423 |
申请日期 |
2006.02.02 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
OHASHI TATSUO |
分类号 |
G03F1/68;G03F1/70;H01L21/82;H01L21/822;H01L27/04 |
主分类号 |
G03F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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